Source gas depletion in narrow metal tube during internal DLC coating with microwave-excited high-density near plasma
Source gas depletion in narrow metal tube during internal DLC coating with microwave-excited high-density near plasma
复制标题
微波激发高密度近等离子体内部 DLC 涂层过程中窄金属管中的源气体耗尽
DOI：
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复制
发表时间：
2012
期刊：
影响因子：
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通讯作者：
N. Umehara
中科院分区：
文献类型：
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作者：
R. Matsui;H. Kousaka;N. Umehara
