Effect of nonlineairty and axial force on frequency drift of a T-shaped tuning fork microresonator
Effect of nonlineairty and axial force on frequency drift of a T-shaped tuning fork microresonator
复制标题
非线性和轴向力对 T 形音叉微谐振器频率漂移的影响
DOI：
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发表时间：
2018
期刊：
影响因子：
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通讯作者：
Xueyong Wei
中科院分区：
文献类型：
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作者：
Xuefeng Wang;Ronghau Huan;Dong Pu;Xueyong Wei
本文研究了非线性对微机械音叉谐振器轴向力灵敏度的影响。首先，建立了该谐振器的同相和反相模统一模型，模型中考虑了二次和三次非线性。实验结果验证了该模型的有效性。然后，从理论和实验上分析了轴向力对频移的影响以及非线性对轴向力灵敏度的影响。观察到由轴向力引起的频率偏移的灵敏度被轻微地增强由软弹簧非线性。这些结果可为静电计、力传感器等实际应用提供参考。
In this paper, the effect of nonlinearity on axial force sensitivity is investigated in a T-shaped micromechanical tuning fork resonator. Firstly, a unifed model of this resonator for both in-phase and anti-phase modes is established, in which the quadratic and cubic nonlinearities are considered. The validity of this proposed model is verifed by the experimental results. Then, the effects of the axial force on the frequency shift and of the nonlinearity on the axial force sensitivity are analyzed theoretically and experimentally. The sensitivity to frequency shift caused by the axial force is observed to be slightly enhanced by soft spring nonlinearity. These results can be used to provide reference for some practical applications, e.g. electrometers, force sensors, etc.