Control of a surface micromachined repulsive-force driven 2D micromirror
Control of a surface micromachined repulsive-force driven 2D micromirror
复制标题
表面微机械斥力驱动二维微镜的控制
DOI：
10.1109/aim.2010.5695890
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发表时间：
2010
期刊：
影响因子：
--
通讯作者：
R. Ben Mrad
中科院分区：
文献类型：
--
作者：
J. Chong;Siyuan He;R. Ben Mrad
两轴微镜用于高速激光束控制，以实现基于矢量的显示。微镜表现出绕两个轴的旋转运动以及通过四个排斥力旋转静电致动单元的平移运动，这些单元围绕镜彼此正交定位。测量数据表明，该微镜可实现一轴±1.6°、另一轴±2.4°的光学扫描角度。每个驱动单元的测量带宽 (−3 dB) 约为 2800 Hz，在 50 V ∼ 200 V 之间的正弦输入电压下工作。当系统用于开环配置时，每个驱动单元的稳定时间为 4 ms，对于 0 V 至 200 V 的阶跃输入，过冲为 80%。
A two-axis micromirror is used in high-speed laser beam steering for vector-based display. The micromirror exhibits rotational motion around two axes as well as translational motion through four repulsive-force rotation electrostatic actuating units, positioned orthogonally from each other around the mirror. Measured data shows that the micromirror can achieve optical scanning angles of ±1.6° in one axis and ±2.4° in the other. The measured bandwidth (−3 dB) for each driving unit is about 2800 Hz operating at a sinusoidal input voltage between 50 V ∼ 200 V. With the system being used in an open-loop configuration, the settling time of each driving unit is 4 ms with an overshoot of 80% for a step input of 0 V to 200 V.