High-Frequency Soft Magnetic Properties of Isotropic Co-Al-N Films
High-Frequency Soft Magnetic Properties of Isotropic Co-Al-N Films
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DOI：
10.1109/tmag.2011.2154302
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发表时间：
2011-09
影响因子：
2.1
通讯作者：
H. Kijima;S. Ohnuma;H. Masumoto
中科院分区：
文献类型：
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作者：
H. Kijima;S. Ohnuma;H. Masumoto
采用射频溅射法制备了Co成分范围较宽的Co- al - n薄膜，以获得高频软磁性能。薄膜由直径为3-5 nm的Co纳米颗粒组成，随机分布在AlN非晶基体中。在Co含量为47 ~ 80at .%的情况下，薄膜具有良好的铁磁性。膜具有垂直磁各向异性，矫顽力在20 ~ 50 Oe左右，各膜平面磁化曲线相同。Co-Al-N薄膜具有优异的磁导率频率响应。特别是Co 80Al 14n6薄膜的磁导率（μ）在1 GHz以内保持恒定，在1.2 GHz左右的共振频率（fr）处有一个明显的峰值。具有垂直磁各向异性的各向同性Co-Al-N薄膜的这种特殊μ -f响应的起源可归因于可旋转磁各向异性。
Co-Al-N films with wide Co compositional range were prepared by the rf-sputtering method in order to obtain soft magnetic properties at high frequencies. The films consisted of Co nano-granules 3-5 nm in diameter, randomly dispersed in an AlN amorphous matrix. Ferromagnetic properties were obtained in the film with a Co content of 47-80 at.%. The films were shown perpendicular magnetic anisotropy with coercivity around 20-50 Oe, and had the same magnetization curve in all film plane directions. Co-Al-N films showed an excellent frequency response of permeability. The permeability (μ) of Co 80Al 14N 6 film, in particular, was constant up to 1 GHz, and exhibited a clear peak at the resonance frequency (fr) at around 1.2 GHz. The origin of this specific μ -f response of isotropic Co-Al-N films with perpendicular magnetic anisotropy can be attributed to the rotatable magnetic anisotropy.