Steam-assisted crystallization of TPA+-oxidized layer of silicon wafer into preferentially-oriented siliceous MFI zeolite film
Steam-assisted crystallization of TPA+-oxidized layer of silicon wafer into preferentially-oriented siliceous MFI zeolite film
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硅片TPA氧化层蒸汽辅助结晶成优先取向硅质MFI沸石薄膜
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通讯作者:
Tatsuya Okubo
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作者:
Watcharop Chaikittisilp;Mark E. Davis;Tatsuya Okubo