Effect of hydrogen plasma exposure on the amount of trans-polyacetylene in nanocrystalline diamond films
Effect of hydrogen plasma exposure on the amount of trans-polyacetylene in nanocrystalline diamond films
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DOI：
10.1116/1.2163885
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发表时间：
2006-01
影响因子：
1.4
通讯作者：
K. Teii;T. Ikeda;A. Fukutomi;K. Uchino
中科院分区：
文献类型：
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作者：
K. Teii;T. Ikeda;A. Fukutomi;K. Uchino
研究了富氢等离子体与纳米金刚石薄膜中非金刚石相的相互作用，探讨了减少非金刚石相的可能性。用微波富Ar等离子体在硅衬底上沉积了平均晶粒尺寸为15- 25 nm的金刚石薄膜。薄膜的可见拉曼光谱中的1140 cm-1峰被用作反式聚乙炔（TPA）片段的特征。TPA相对于无定形碳的量随着富Ar的scinH 2 scinCH 4等离子体中的H2 scinCH 4比率的增加而增加，或者简单地通过在沉积后将生长的膜暴露于氢等离子体来增加。然而，金刚石的拉曼峰，这是由无定形碳的D峰叠加，通过暴露于这些富氢等离子体几乎没有增强。还发现，TPA的相对量的增加并不总是伴随着膜中氢含量的增加。对实验结果进行了沿着解释，并对TPA的形成机理进行了讨论。
The interactions between hydrogen-rich plasmas and nondiamond phases contained in nanocrystalline diamond films have been examined to explore a possibility of reducing the amount of nondiamond phases. Diamond films with average grain sizes of 15–25nm were deposited on silicon in microwave Ar-rich∕H2∕CH4 plasmas. The 1140cm−1 peak in the visible Raman spectra for the films was used as a signature of trans-polyacetylene (TPA) segments. The amount of TPA relative to amorphous carbon increased with increasing H2∕CH4 ratio in the Ar-rich∕H2∕CH4 plasmas or simply by exposing the as-grown film to hydrogen plasmas after deposition. However, the Raman peak of diamond, which was superimposed by the D peak of amorphous carbon, was little enhanced by exposure to these hydrogen-rich plasmas. It was also found that an increase in the relative amount of TPA was not always accompanied by an increase in hydrogen content in the films. The results were interpreted along the possible mechanisms of TPA formation, which are co...