Characterization of manufacturability of microstructures for micro-injection moulding of micro devices using star patterns
Characterization of manufacturability of microstructures for micro-injection moulding of micro devices using star patterns
复制标题
使用星形图案表征微型器件微注射成型的微结构的可制造性
DOI：
10.1088/1361-6439/ab5da1
复制
发表时间：
2020-02-01
影响因子：
2.3
通讯作者：
Fang, Fengzhou
中科院分区：
文献类型：
--
作者：
Hou, Jian;Zhang, Honggang;Fang, Fengzhou
微特征的复制精度在微流体、微光学等聚合物微器件中起着非常重要的作用。然而，目前还没有有效的方法来评估这种微结构的可制造性。本研究发展了一种新的方法，使用一个星星图案的宽度和纵横比的连续变化来表征微结构的可制造性。所设计的图案具有20微米至320微米的宽度和2.5至0.156的纵横比。在星星图案上设计了同心标记，以便于识别各种工艺下可达到的特征精度。结果发现，干法刻蚀和电铸造成的深度误差小于5%，而从注射成型的最大误差为2.8%，其中通道的纵横比小于1。然而，当突起微结构的纵横比大于1且宽度为50 μm时，在标称注塑条件下发生填充不足，相对误差大于10%。设计的星星图案被证明是一个简单和快速的方法来确定可达到的特征精度的聚合物微复制工艺，包括注塑成型和热压。
The replication accuracy of micro features plays a very important role in polymeric micro devices, such as microfluidic and micro optics. However, there is no effective way at the moment for the assessment of manufacturability of such microstructures. This study develops a new method of using a star pattern with a continuous change of width and aspect ratio to characterize the manufacturability of microstructures. The designed patterns have a width from 20 microns to 320 microns with an aspect ratio from 2.5 to 0.156. Concentric markers are designed on the star patterns for the easy identification of achievable feature accuracy under various processes. It is found that the dry etching and electroforming cause a depth error of less than 5%, while the maximum error from injection moulding is 2.8% where the channel aspect ratio is less than 1. However, when the aspect ratio of protrusion microstructures is higher than 1 with a width of 50 µm, insufficient filling occurs under nominal injection moulding conditions with relative error more than 10%. The designed star patterns are proved to be an easy and fast way to determine achievable feature accuracy for polymer micro replication processes, including injection moulding and hot embossing.