Microelectromechanical Systems for Nanomechanical Testing: Displacement- and Force-Controlled Tensile Testing with Feedback Control
Microelectromechanical Systems for Nanomechanical Testing: Displacement- and Force-Controlled Tensile Testing with Feedback Control
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DOI：
10.1007/s11340-020-00619-z
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发表时间：
2020-06-30
影响因子：
2.4
通讯作者：
Zhu, Y.
中科院分区：
文献类型：
--
作者：
Li, C.;Cheng, G.;Zhu, Y.
背景：基于 MEMS 的纳米力学测试引起了广泛关注。然而，执行位移和力控制的纳米力学测试（例如应力松弛和蠕变）仍然具有挑战性。目标：我们报告了一种基于 MEMS 的设备，用于使用反馈控制对一维纳米材料进行位移和力控制的拉伸测试。方法：该装置由静电执行器、称重传感器和两个差分电容传感器组成。样本安装在一侧的固定锚和另一侧的位移传感器之间。使用多通道电容式读数，可以从读数中同时测量样本位移和力（因此应变和应力），而不需要通常用于位移测量的成像。结果：通过反馈控制，可以实现位移控制和力控制的拉伸测试。该装置的功能在金属纳米线的三个代表性测试中得到了证明：应力松弛测试、捕获快速应力下降的拉伸测试和蠕变测试。结论：所报道的 MEMS 器件可用于一系列无法通过成像进行位移测量的测试，例如不同环境下的现场测试、高速率测试和疲劳测试。
Background: MEMS-based nanomechanical testing has received much interests. However, it remains challenging to perform displacement- and force-controlled nanomechanical tests (e.g., stress relaxation and creep). Objective: We report a MEMS-based device for displacement- and force-controlled tensile testing of 1D nanomaterials using feedback control. Methods: The device consists of an electrostatic actuator, a load cell, and two differential capacitive sensors. A specimen is mounted between a fixed anchor on one side and a displacement sensor on the other side. Using a multi-channel capacitive readout, both specimen displacement and force (thus strain and stress) can be measured from the readout simultaneously, without the need of imaging that is often used for displacement measurement. Results: With the feedback control, both displacement- and force-controlled tensile testing can be achieved. The capability of the device is demonstrated in three representative tests of metallic nanowires - stress relaxation test, tensile test capturing rapid stress drop, and creep test. Conclusions: The reported MEMS device can be used for a range of tests where imaging for displacement measurement is not feasible, such asex-situtests, high-rate tests, and fatigue tests in different environments.