Improvement in laser micromachinability of borosilicate glass by electric-field-assisted solid-state ion exchange
Improvement in laser micromachinability of borosilicate glass by electric-field-assisted solid-state ion exchange
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DOI：
10.1016/j.scriptamat.2009.10.013
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发表时间：
2010-02-01
影响因子：
6
通讯作者：
Watanabe, Takehiro
中科院分区：
文献类型：
--
作者：
Matsusaka, Souta;Watanabe, Takehiro
为了改善硼硅酸盐玻璃的激光加工性能，采用电场辅助固态离子交换法在玻璃表面掺杂铜离子。利用纳秒紫外激光照射含铜区域，由于其高的光吸收，产生了平整、光滑、无缺陷的孔。然而，当处理的孔底部达到离子穿透深度时，孔的形状急剧退化。因此，良好设计和控制的离子分布是必要的微元件的高精度制造。(C)2009 Acta Materialia Inc.由爱思唯尔有限公司出版。保留所有权利。
In order to improve the laser machinability of borosilicate glass, copper ions were doped to the glass surface by electric-field-assisted solid-state ion-exchange method. The nanosecond ultraviolet laser irradiation of copper-containing regions produced flat, smooth and defect-free holes because of their high optical absorptions. However, the shapes of the holes were drastically degraded when the processed hole bottoms reached ion penetration depths. Therefore, well-designed and controlled ion distribution was necessary for the high-accuracy fabrication of microcomponents. (C) 2009 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.