Silicon Micro-Machines for Fun and Profit
Silicon Micro-Machines for Fun and Profit
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DOI：
10.1007/s10909-012-0654-z
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发表时间：
2012-12-01
影响因子：
2
通讯作者：
Aksyuk, Vladimir
中科院分区：
文献类型：
--
作者：
Bishop, David;Pardo, Flavio;Aksyuk, Vladimir
在过去十年左右的时间里，我们一群人在贝尔实验室工作时，已经能够开发出大量的硅微机器，用于广泛的应用。在这篇文章中，这是一个特殊的卷的一部分，以庆祝职业生涯的教授弗朗西斯加斯帕里尼谁是一个老朋友和同事，我们审查的设备，我们已经能够建立和讨论他们的应用。这些应用范围从单涡旋动力学的科学实验和卡西米尔效应的观察到大型全光开关等技术应用。在这篇文章中，我们指出，MEMS器件和超大规模集成电路处理是“新物理机器车间”。
Over the last decade or so a group of us, while working at Bell Labs, have been able to develop a large number of silicon micromachines for a wide range of applications. In this article, which is part of a special volume to celebrate the career of Professor Francis Gasparini who is an old friend and colleague, we review the devices we have been able to build and discuss their applications. These applications range from scientific experiments looking at single vortex dynamics and the observation of the Casimir effect to technological applications such as a large, all-optical switch. In this article we make the point that MEMS devices and VLSI processing are the "New Physics Machine Shop".