Fabrication and Characterization of Diffraction Gratings Using Photosensitive Al2O3 Gel Films
Fabrication and Characterization of Diffraction Gratings Using Photosensitive Al2O3 Gel Films
复制标题
DOI：
10.1143/jjap.37.1842
复制
发表时间：
1998-04
影响因子：
1.5
通讯作者：
Gaoyang Zhao;N. Tohge;J. Nishii
中科院分区：
文献类型：
--
作者：
Gaoyang Zhao;N. Tohge;J. Nishii
提出了一种利用光敏氧化铝凝胶膜结合相掩膜制备衍射光栅的新工艺。用苯甲酰丙酮对Al(O-sec-Bu)3进行化学修饰，制备了光敏氧化铝凝胶膜。这些凝胶膜在紫外范围内表现出光学吸收带，这与β-二酮酸配体的螯合环的π -π *跃迁有关。用XeF和KrF准分子激光照射这些凝胶膜降低了它们在含有1.2 vol%HNO3的丙酮中的溶解度，同时剩余的螯合环解离。将上述研究结果应用于在硅和二氧化硅衬底上制备Al2O3薄膜衍射光栅；凝胶膜用准分子激光通过相掩膜照射，浸出，然后热处理。根据制备条件，分别在反射（Si sub.）和透射（silica sub.）模式下对所制备光栅的衍射效率进行了评价。
A new process for the fabrication of diffraction gratings has been proposed using photosensitive Al2O3 gel films in combination with a phase mask. Photosensitive Al2O3 gel films were derived from Al(O-sec-Bu)3 chemically modified with benzoylacetone. These gel films exhibited an optical absorption band in the UV-range, which is associated with the π–π* transition of chelate rings of the β-diketonate ligand. The irradiation of these gel films with XeF and KrF excimer lasers decreased their solubility in acetone containing 1.2 vol%HNO3, simultaneously with the dissociation of the remaining chelate rings. The above findings were applied to the fabrication of Al2O3 film diffraction gratings on Si and silica substrates; the gel films were irradiated with the excimer lasers through a phase mask, leached, and then heat-treated. The diffraction efficiency of the fabricated gratings was evaluated in reflection (Si sub.) and transmission (silica sub.) modes with respect to the preparation conditions.