H.Kumano, H.Soyama, M.Saka: "Evaluation of the Damage for Gettering in Silicon Wafer Introduced by a Cavitating Jet"Proceedings of 5th International Conference on Fracture and Strength of Solids. CD-ROM. 1-5 (2004)
H.Kumano, H.Soyama, M.Saka: "Evaluation of the Damage for Gettering in Silicon Wafer Introduced by a Cavitating Jet"Proceedings of 5th International Conference on Fracture and Strength of Solids. CD-ROM. 1-5 (2004)
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H.Kumano、H.Soyama、M.Saka：“Evaluation of the Damage for Gettering in Silicon Wafer Introduced by a Cavitation Jet”第五届国际固体断裂与强度会议论文集。
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