CRYSTALLOGRAPHIC AND MAGNETIC CHARACTERISTICS OF c-AXIS ORIENTED Ba FERRITE LAYER DEPOSITED ON Pt(111) UNDERLAYER
CRYSTALLOGRAPHIC AND MAGNETIC CHARACTERISTICS OF c-AXIS ORIENTED Ba FERRITE LAYER DEPOSITED ON Pt(111) UNDERLAYER
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Pt(111) 底层上沉积的 c 轴取向 Ba 铁氧体层的晶体学和磁性特性
DOI：
10.3379/jmsjmag.21.s2_73
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发表时间：
1997
影响因子：
--
通讯作者：
M. Naoe
中科院分区：
文献类型：
--
作者：
T. Siosawa;M. Ichinose;N. Matsushita;S. Nakagawa;M. Naoe
采用无等离子体溅射法在热氧化硅衬底上制备了Ba铁氧体/Pt双层薄膜，研究了衬底温度Ts和Pt衬底对薄膜晶体学和磁性的影响。在高于500 °C的Ts下沉积的Ba铁氧体膜即使没有后退火也显示出上级c轴取向。在Ts为200 ~ 450 °C的条件下沉积的Ba铁氧体薄膜显示出优异的c轴取向性，并在800 °C下退火后显示出极低的矫顽力。这些结果表明，铂底层可能是有用的，以降低钡铁氧体薄膜的结晶温度。
Ba ferrite/Pt bilayered films were deposited on thermally oxidized Si wafers using plasma-free sputtering method, and the dependence of crystallographical and magnetic characteristics on the substrate temperature Ts and the effectiveness of Pt underlayers were investigated. Ba ferrite films deposited at Ts above 500 °C revealed superior c-axis orientation even without post-annealing. Ba ferrite films deposited at Ts in the range from 200 to 450 °C revealed excellent c-axis orientation and exhibited extremely low coercivity after post-annealing at 800 °C. These results suggest that the Pt underlayers may be useful to reduce crystallization temperature of Ba ferrite films.