A shunt-type RF MEMS switch at 3.3V operation actuated by Lorentz force and electrostatic hold
A shunt-type RF MEMS switch at 3.3V operation actuated by Lorentz force and electrostatic hold
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DOI：
10.1109/sensor.2005.1496636
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发表时间：
2005-06
期刊：
影响因子：
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通讯作者：
Il-Joo Cho;Taeksang Song;Sang-Hyun Baek;E. Yoon
中科院分区：
文献类型：
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作者：
Il-Joo Cho;Taeksang Song;Sang-Hyun Baek;E. Yoon
在本文中，我们提出并制作了一种新的并联型RF MEMS开关的洛伦兹力和静电保持相结合的低功耗和低电压操作。没有静态功耗，因为它只在改变状态时消耗功率。所提出的开关可以在大的驱动力下操作，并且可以提高功率处理能力和机械稳定性。所制造的开关被致动与49 mA的施加电流和致动电压为3.3 V。此外，功耗为87.9 /spl mu/J每次切换。
In this paper, we have proposed and fabricated a new shunt-type RF MEMS switch actuated by a combination of Lorentz force and electrostatic hold for low power consumption and low voltage operation. There is no static power consumption because it only consumes power when changing state. The proposed switch can be operated with large actuation force and it can enhance power handling capability and mechanical stability. The fabricated switch is actuated with an applied current of 49 mA and the actuation voltage is 3.3 V. Also, the power consumption is 87.9 /spl mu/J per switching.