Direct Writing of Copper Micropatterns Using Near-Infrared Femtosecond Laser-Pulse-Induced Reduction of Glyoxylic Acid Copper Complex
Direct Writing of Copper Micropatterns Using Near-Infrared Femtosecond Laser-Pulse-Induced Reduction of Glyoxylic Acid Copper Complex
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DOI：
10.3390/mi10060401
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发表时间：
2019-06-01
期刊：
影响因子：
3.4
通讯作者：
Ohishi, Tomoji
中科院分区：
文献类型：
--
作者：
Mizoshiri, Mizue;Aoyama, Keiko;Ohishi, Tomoji
我们已经制作了铜基微图案在环境中使用飞秒激光直写减少乙醛酸铜配合物旋涂到玻璃基板上。为了做到这一点，我们在空气中的复杂的薄膜上扫描了一系列聚焦的飞秒激光脉冲，然后通过用乙醇冲洗基板来去除未照射的复合物。当激光脉冲能量为0.156 nJ，扫描速度为500和1000 μ m/s时，获得的最小线宽为6.1 μ m。这条线的宽度是显着小于在以前的工作中使用CO2激光器获得。此外，这些线是导电的。然而，线图案的最小电阻率为2.43 × 10（-6）Ω中心点m，其类似于使用CO2激光器形成的图案的电阻率的10倍。X射线衍射分析表明，乙醛酸铜络合物的还原和再氧化之间的平衡决定了环境空气中高度还原的铜图案的性质。
We have fabricated Cu-based micropatterns in an ambient environment using femtosecond laser direct writing to reduce a glyoxylic acid Cu complex spin-coated onto a glass substrate. To do this, we scanned a train of focused femtosecond laser pulses over the complex film in air, following which the non-irradiated complex was removed by rinsing the substrates with ethanol. A minimum line width of 6.1 mu m was obtained at a laser-pulse energy of 0.156 nJ and scanning speeds of 500 and 1000 mu m/s. This line width is significantly smaller than that obtained in previous work using a CO2 laser. In addition, the lines are electrically conducting. However, the minimum resistivity of the line pattern was 2.43 x 10(-6) Omega center dot m, which is similar to 10 times greater than that of the pattern formed using the CO2 laser. An X-ray diffraction analysis suggests that the balance between reduction and re-oxidation of the glyoxylic acid Cu complex determines the nature of the highly reduced Cu patterns in the ambient air.