Dynamic Actuation of Soft 3D Micromechanical Structures Using Micro-Electromechanical Systems (MEMS)
Dynamic Actuation of Soft 3D Micromechanical Structures Using Micro-Electromechanical Systems (MEMS)
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DOI：
10.1002/admt.201700293
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发表时间：
2018-03-01
影响因子：
6.8
通讯作者：
White, Alice E.
中科院分区：
文献类型：
--
作者：
Jayne, Rachael K.;Stark, Thomas J.;White, Alice E.
直接激光写入 (DLW) 是一种先进的制造技术，允许用户利用聚合物前驱体创建复杂的 3D 微结构。这些微结构可以与微机电系统（MEMS）执行器集成。 MEMS 执行器提供了一个方便的平台，用于与复杂的微结构相互作用，以表征其机械性能或导致其变形。结构直接制造在使用商业铸造工艺生产的静电梳状驱动器和 V 形热致动器上。通过向 MEMS 执行器施加电压，可以观察到这些微结构的高度受控变形。比较了用不同材料和制造条件生产的微结构的机械行为。 MEMS-DLW 集成是表征 DLW 微结构力学的一种便捷方法，很可能会产生一种新型动态 3D 设备，适用于从组织工程到成像等各种应用。
Direct laser writing (DLW) is an advanced fabrication technique that allows users to create complex 3D microstructures from polymer precursors. These microstructures can be integrated with micro-electromechanical systems (MEMS) actuators. MEMS actuators provide a convenient platform for interacting with the intricate microstructures, either to characterize their mechanical properties or cause them to deform. Structures are fabricated directly onto electrostatic comb drives and chevron thermal actuators that are produced using a commercial foundry process. By applying a voltage to the MEMS actuators, highly controlled deformation of these microstructures is observed. Mechanical behaviors of microstructures produced with different materials and fabrication conditions are compared. MEMS-DLW integration is a convenient approach to characterizing the mechanics of DLW microstructures and may well lead to a new class of dynamic 3D devices for applications ranging from tissue engineering to imaging.