Characterization of Electric Discharge Machining for Silicon Carbide Single Crystal
Characterization of Electric Discharge Machining for Silicon Carbide Single Crystal
复制标题
碳化硅单晶电火花加工表征
DOI：
10.4028/www.scientific.net/msf.600-603.855
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发表时间：
2008
期刊：
影响因子：
--
通讯作者：
K. Arai
中科院分区：
文献类型：
--
作者：
Tomohisa Kato;T. Noro;Hideaki Takahashi;S. Yamaguchi;K. Arai
在这项研究中，我们报道了电火花加工（EDM）作为碳化硅（SiC）单晶的一种新的切削方法。此外，我们还讨论了电火花加工的特点和用途。电火花加工不仅实现了高速、光滑的切削，而且降低了表面损伤。通过使用熔融KOH观察蚀刻坑，我们也估计了电火花加工sic中的缺陷传播，然而，我们证实，尽管在加工过程中的高压和高温下，电火花加工在sic内部没有造成损伤。
In this study, we report electric discharge machining (EDM) as a new cutting method for silicon carbide (SiC) single crystals. Moreover, we discuss characteristics and usefulness of the EDM for the SiC. The EDM realized not only high speed and smooth cutting but also lower surface damage. Defect propagation in the EDM SiCs have been also estimated by etch pits observation using molten KOH, however, we confirmed the EDM has caused no damage inside the SiCs in spite of high voltage and high temperature during the machining.