A Compact 5-bit Switched-line Digital MEMS Phase Shifter
A Compact 5-bit Switched-line Digital MEMS Phase Shifter
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紧凑型 5 位开关线路数字 MEMS 移相器
DOI：
10.1109/nems.2006.334859
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发表时间：
2006
期刊：
影响因子：
--
通讯作者：
Lu Le
中科院分区：
文献类型：
--
作者：
Z. Jian;Yu;Cheng Chen;Zhang Yong;Lu Le
设计并制造了一种采用 3 端口 RF MEMS 开关的紧凑型 5 位数字 MEMS 移相器。它基于交换线路设计，总共使用了二十个交换机。 3 端口交换机的测量表明，10GHz 时插入损耗为 0.66dB，隔离度为 23.3dB。 5位MEMS移相器在200μm高电阻率硅基板上制造，总尺寸为7mm×4mm。 PCM（过程控制监视器）用于控制过程的稳定性和一致性。该移相器在X频段表现良好，在10GHz时平均插入损耗为3.6dB，相移误差小于5deg。
A compact 5-bit digital MEMS phase shifter that employs 3-port RF MEMS switches is designed and fabricated. It is based on the switched-line design and totally twenty switches are used. Measurements of the 3-port switch indicate an insertion loss of 0.66dB and an isolation of 23.3dB at 10GHz. The 5-bit MEMS phase shifter are fabricated on 200 mum high resistivity silicon substrates with total size of 7 mm times 4 mm. PCM (Process Control Monitor) is applied to control the stability and consistency of the process. The phase shifter performed well in X band, with an average 3.6dB insertion loss and phase shift error less than 5deg at 10GHz.