Generation of spatially coherent light at extreme ultraviolet wavelengths
Generation of spatially coherent light at extreme ultraviolet wavelengths
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DOI：
10.1126/science.1071718
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发表时间：
2002-07-19
期刊：
影响因子：
56.9
通讯作者：
Jacobsen, C
中科院分区：
文献类型：
--
作者：
Bartels, RA;Paul, A;Jacobsen, C
我们提出了通过飞秒激光高次谐波上转换过程产生的极紫外（EUV）光的空间相干测量。与相位匹配的中空光纤的几何形状，所产生的光束被发现表现出基本上完全的空间相干性。这种类激光EUV光源的相干性通过记录小物体的伽柏全息图来显示。这项工作证明了与桌面实验装置进行EUV全息的能力。这种具有低发散度和高空间相干性的EUV源可用于涉及高精度计量、EUV光刻的光学部件检查以及具有纳米分辨率的显微镜和全息术的实验。此外，EUV辐射的短持续时间（几飞秒）将使EUV显微镜和全息术能够以100倍的时间分辨率进行。
We present spatial coherence measurements of extreme ultraviolet (EUV) light generated through the process of high-harmonic up-conversion of a femtosecond laser. With a phase-matched hollow-fiber geometry, the generated beam was found to exhibit essentially full spatial coherence. The coherence of this laser-like EUV source was shown by recording Gabor holograms of small objects. This work demonstrates the capability to perform EUV holography with a tabletop experimental setup. Such an EUV source, with low divergence and high spatial coherence, can be used for experiments involving high-precision metrology, inspection of optical components for EUV lithography, and microscopy and holography with nanometer resolution. Furthermore, the short time duration of the EUV radiation ( a few femtoseconds) will enable EUV microscopy and holography to be performed with ultrahigh time resolution.