X-ray microbeam with sputtered-sliced Fresnel zone plate at SPring-8 undulator beamline

X-ray microbeam with sputtered-sliced Fresnel zone plate at SPring-8 undulator beamline
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SPring-8 波荡器光束线处带有溅射切片菲涅尔波带板的 X 射线微束

DOI:
10.1016/s0168-9002(01)00532-0
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发表时间:
2000
影响因子:
1.4
通讯作者:
K. Handa
K. Handa
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
Yoshio Suzuki;M. Awaji;Y. Kohmura;A. Takeuchi;H. Takano;N. Kamijo;S. Tamura;M. Yasumoto;K. Handa

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在SPring-8波荡器光束线上,对由菲涅耳波带片切片产生的硬X射线微束进行了测试。在0.15- 1.5A λ的X射线波长区域中评估聚焦特性。在1.4A波长下,焦斑尺寸约为0.6 μm。在扫描显微镜实验中,在0.45埃波长的X射线下分辨出了0.2 μm结构的分辨测试图案。
A hard X-ray microbeam created from a sputtered-sliced Fresnel zone plate has been tested at SPring-8 undulator beamline. Focusing properties are evaluated in the X-ray wavelength regions of 0.15–1.5 A ̊ . The measured focal beam size is about 0.6 μm at an X-ray wavelength of 1.4 A ̊ . In a scanning microscopy experiment, resolution-test-patterns with 0.2 μm structure are resolved at an X-ray wavelength of 0.45 A ̊ .
S.Aoki:““在特里斯坦主环 (KEK) 使用 Wolter 型掠入射镜进行亚微米 X 射线束微束生产”
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