Diffraction modelling of laser ablation using transmission masks
Diffraction modelling of laser ablation using transmission masks
复制标题
使用透射掩模的激光烧蚀衍射建模
DOI：
10.1016/j.optcom.2004.06.033
复制
发表时间：
2004
影响因子：
2.4
通讯作者：
C. Walton
中科院分区：
文献类型：
--
作者：
P. Dyer;J. Mackay;C. Walton
本文基于菲涅耳-基尔霍夫衍射积分的简化形式与材料去除的基本模型的耦合，分析了透射掩模烧蚀过程中的近场衍射效应。描述了方形、六边形和圆形接近掩模的建模，并与先前报道的使用准分子、飞秒和co2激光器的玻璃、硅和聚酰亚胺实验进行了比较。该模型具有普遍的适用性，可以为近场衍射对烧蚀成像的影响提供有用的见解。
We present an analysis of near-field diffraction effects in ablation with transmission masks, based on coupling a simplified form of the Fresnel–Kirchhoff diffraction integral with basic models for material removal. Modelling for square, hexagonal and circular proximity masks is described and compared with previously reported experiments on glass, silicon and polyimide using excimer, femtosecond and CO2lasers. The model has general applicability and can provide useful insight into the effect of near-field diffraction in ablation patterning.