Dynamic displacement measurement based on triangle phase modulation without preliminary measurement of half-wave voltage for phase modulator
Dynamic displacement measurement based on triangle phase modulation without preliminary measurement of half-wave voltage for phase modulator
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DOI：
10.1088/1361-6501/aa5d4b
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发表时间：
2017-02
影响因子：
2.4
通讯作者：
Yosuke Tanaka;Ryosuke Kimura;Takamasa Ito;T. Kurokawa
中科院分区：
文献类型：
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作者：
Yosuke Tanaka;Ryosuke Kimura;Takamasa Ito;T. Kurokawa
提出了一种改进的基于三角相位调制的动态位移测量方法。深度相位调制的使用消除了对相位调制器的半波电压Vπ的初步测量的需要。我们演示了几十纳米尺度的位移测量发生在几微秒内，时间分辨率为33 ns。通过对干涉仪采用简单的反馈控制，也实现了长期稳定性。实验证明，该系统的测量精度与以前研制的系统一样高，需要对Vπ进行仔细的初步测量。
This paper presents an improved method for our recently proposed dynamic displacement measurement based on triangle phase modulation. The use of deep phase modulation eliminates the need for preliminary measurement of half-wave voltage Vπ for the phase modulator. We demonstrate displacement measurement with tens-of-nanometer scale taking place within a few micro seconds, where the temporal resolution is 33 ns. A long-term stability is also realized by employing a simple feedback control for the interferometer. The measurement precision is proved to be as high as that in the previously developed system that required careful preliminary measurement of Vπ.