K、Watanabe,Y.Nakayama,K、Wakita and T.Kawamura: "Preparation of aーSiH in SiH_4 plasma sustained by radio frequency superimposed on low frequency" Proceedings of the 8th Symposium on Plasma Processing. 253-256 (1991)
K、Watanabe,Y.Nakayama,K、Wakita and T.Kawamura: "Preparation of aーSiH in SiH_4 plasma sustained by radio frequency superimposed on low frequency" Proceedings of the 8th Symposium on Plasma Processing. 253-256 (1991)
复制标题
K、Watanabe、Y. Nakayama、K、Wakita 和 T. Kawamura:“在 SiH_4 等离子体中制备由射频叠加低频维持的 a-SiH”第八届等离子体处理研讨会论文集 253-256(1991 年)。
DOI:
--
复制
发表时间:
--
期刊:
影响因子:
--
通讯作者:
中科院分区:
文献类型:
--
作者: