Effects of coating materials on two dimensional stress-induced deflection of nanomechanical sensors.
Effects of coating materials on two dimensional stress-induced deflection of nanomechanical sensors.
复制标题
涂层材料对纳米机械传感器二维应力引起的偏转的影响。
DOI：
10.1166/jnn.2014.8604
复制
发表时间：
2014
影响因子：
--
通讯作者：
Kota Shiba
中科院分区：
文献类型：
--
作者：
Genki Yoshikawa;Cory J Y Lee;Kota Shiba
纳米机械传感器被认为是各种应用的有前途的平台，如果没有适当的涂层（受体）层，将不会产生任何可测量的信号。尽管对涂层的这种关键依赖性，但几乎没有关于这些层的材料性能优化的指导方针；例如，杨氏模量、泊松比和几何参数。在本研究中，通过有限元分析 (FEA) 研究了涂层厚度 [3 nm-10 μm]、杨氏模量 [100 Pa 至约 1 TPa] 和泊松比 [0.10 至约 0.45] 的影响，重点关注在涂层顶部（即表面应力）或涂层与硅悬臂之间的界面处产生二维 (2D) 应力的系统。研究发现，涂层可以根据其材料特性增强或减少纳米机械传感器的偏转。这些结果为设计涂层以实现更高的灵敏度提供了指导。
Nanomechanical sensors, which have been expected as a promising platform for various applications, will not generate any measureable signal without an appropriate coating (receptor) layer. In spite of this critical dependence on the coating layer, there is almost no guideline for the optimization of these layers in terms of their material properties; such as, Young's modulus, Poisson's ratio, and geometrical parameters. In the present study, the effects of coating layer thickness [3 nm-10 microm], Young's modulus [100 Pa to approximately 1 TPa], and Poisson's ratio [0.10 to approximately 0.45] are investigated with the finite element analysis (FEA), focusing on systems with two dimensional (2D) stress induced either on top of the coating layer (i.e., surface stress) or at the interface between the coating layer and the silicon cantilever. It is found that the coating layer can either enhance or reduce the deflection of nanomechanical sensors depending on its material properties. These results provide guidelines for designing a coating layer to achieve higher sensitivity.