Rigorous reflectance performance analysis of Si3N4 self-suspended subwavelength gratings
Rigorous reflectance performance analysis of Si3N4 self-suspended subwavelength gratings
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DOI：
10.1016/j.optcom.2006.09.028
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发表时间：
2007-02
影响因子：
2.4
通讯作者：
Jia-sheng Ye;Y. Kanamori;F. Hu;K. Hane
中科院分区：
文献类型：
--
作者：
Jia-sheng Ye;Y. Kanamori;F. Hu;K. Hane
通过改变入射波长、光栅周期、光栅厚度和光栅填充率等参数，研究了Si3N4自悬式亚波长光栅（SSG）的反射特性。对于TM偏振入射，严格耦合波方法的数值计算结果表明，Si_3N_4 SSG在光通信波长范围内具有窄线宽（小于1nm）、高峰反射率（100%）和低边带（小于0.5%）。通过使用微机电系统致动器，认为Si_3N_4SSG可以用作光通信系统中的可调谐光滤波器。
In this paper, we make an investigation into the reflectance performance of the Si3N4self-suspended subwavelength grating (SSG) via changing several parameters including the incident wavelength, the grating period, the grating thickness and the grating filling ratio. For TM polarization of incidence, numerical results by the rigorous coupled-wave method reveal that the reflectance spectrum of the Si3N4SSG has a narrow linewidth (less than 1nm), high peak reflectance (100%), and low side bands (less than 0.5%) simultaneously in the optical telecommunication wavelength region. By using a micro-electromechanical-systems actuator, it is believed that the Si3N4SSG should serve as tunable optical filters in optical telecommunication systems.