Length and thickness dependence of longitudinal flexural resonance frequency shifts of a piezoelectric microcantilever sensor due to Young's modulus change
Length and thickness dependence of longitudinal flexural resonance frequency shifts of a piezoelectric microcantilever sensor due to Young's modulus change
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DOI：
10.1063/1.2990057
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发表时间：
2008-10-01
影响因子：
3.2
通讯作者：
Shih, Wei-Heng
中科院分区：
文献类型：
--
作者：
Shih, Wan Y.;Zhu, Qing;Shih, Wei-Heng
对于压电微悬臂梁传感器(PEMS)，其检测过程中的共振频率漂移是由于压电层中杨氏模数的变化引起的，我们证明了它们的检测纵向弯曲共振频移Delta f与PEMS长度的平方L-2成反比，它们的相对谐振频移Delta f/f与PEMS厚度t成反比，以及它们的质量检测灵敏度Delta f/Delta m与wL(3)成反比，其中w是宽度。压电层中杨氏模数变化引起的共振频率漂移比质量变化所预期的大300多倍。(C)2008年美国物理研究所。[DOI：10.1063/1.2990057]
For piezoelectric microcantilever sensors (PEMSs) whose resonance frequency shift during detection is due to Young's modulus change in the piezoelectric layer, we showed that their detection longitudinal flexural resonance frequency shift, Delta f, is inversely proportional to the square of the PEMS length, L-2; their relative resonance frequency shift, Delta f/f, inversely proportional to the PEMS thickness, t; and their mass detection sensitivity, Delta f/Delta m, inversely proportional to wL(3) where w is the width. The resonance frequency shift caused by Young's modulus change in the piezoelectric layer is more than 300 times larger than would be expected from the mass change. (C) 2008 American Institute of Physics. [DOI: 10.1063/1.2990057]