Noncontact Ultrasonic Imaging of Subsurface Defects Using a Laser-Ultrasonic Technique
Noncontact Ultrasonic Imaging of Subsurface Defects Using a Laser-Ultrasonic Technique
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使用激光超声技术对地下缺陷进行非接触式超声成像
DOI:
10.1143/jjap.35.3075
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发表时间:
1996
期刊:
影响因子:
--
通讯作者:
Yoshihisa Tanaka Yoshihisa Tanaka
中科院分区:
文献类型:
--
作者:
H. Yamawaki;Tetsuya Saito;H. Fukuhara;C. Masuda;Yoshihisa Tanaka Yoshihisa Tanaka
Noncontact ultrasonic imaging of subsurface defects using a laser-ultrasonic technique was demonstrated. Pulsed laser irradiation was used for ultrasonic generation, and optical heterodyne interferometry was used for detection of ultrasonic vibration on the specimen surface. Bonded thin plates with character-shaped hallmarks with 1.5 mm width on bonding layer were used as specimens. Imagings in ultrasonic transmission and reflection modes were performed, and imagings using not only XY-scanning of specimens but also a laser beam scanner were demonstrated. Ultrasonic images of hallmarks located 0.2 mm below the specimen surface were obtained through the experiments.