Cross-supported planar MEMS vector hydrophone for high impact resistance
Cross-supported planar MEMS vector hydrophone for high impact resistance
复制标题
交叉支撑平面 MEMS 矢量水听器，具有高抗冲击性
DOI：
10.1016/j.sna.2017.06.010
复制
发表时间：
2017-08-15
影响因子：
4.6
通讯作者：
Wang, Renxin
中科院分区：
文献类型：
--
作者：
Bai, Bing;Ren, Ziming;Wang, Renxin
抗高过载冲击和灵敏度是影响空投声纳浮标可靠性的两个主要因素。为了提高空投用MEMS矢量水听器的抗高过载冲击能力和灵敏度，提出了一种交叉支撑平面MEMS矢量水听器。在晶片上定义具有惠斯通电桥的平面形振动单元，并且在晶片的背面蚀刻应力集中区（SCR）。通过理论计算和数值计算，当浮标抛入海中与水接触时，加速度冲击可达2000 m/s（2）。根据模拟，最大等效应力分别为91.3 MPa（沿着X轴方向）、92.3 MPa（沿着Y=X轴方向）和16.2 MPa（沿着Z轴方向），而Si的断裂强度为175 MPa。综合考虑水听器的灵敏度、频率和抗冲击能力，确定了最佳参数。测试结果表明，该水听器具有良好的灵敏度和指向性。总之，研制了交叉支撑平面MEMS矢量水听器，初步证实了其优越性。(C)2017由Elsevier B. V.出版
The high g shock resistance and sensitivity are two dominant factors to impact the airdropped sonobuoy reliability. In order to improve the high g shock resistance and sensitivity of MEMS vector hydrophones for airdropped application, cross-supported planar MEMS vector hydrophone is presented in this paper. The planar-shaped vibration unit with the Wheatstone bridge is defined on the wafer, and stress concentration region (SCR) is etched on the back of wafer. After theoretical and numerical calculation, the acceleration shock reaches up to 2000m/s(2) when the sonobuoy is thrown in the sea and contacted the water. According to the simulation, the max equivalent stresses respectively are 91.3 MPa (along the direction of X axis), 92.3 MPa (along the direction of Y=X axis) and 16.2 MPa (along the direction of Z axis), whereas the fracture strength of Si is reported 175 MPa. Optimum parameters are determined in view of the sensitivity, frequency and impact resistance of hydrophone. The test results demonstrated the hydrophone has favorable sensitivity and directivity. In brief, the cross-supported planar MEMS vector hydrophone was fabricated and its superiority was preliminarily confirmed. (C) 2017 Published by Elsevier B.V.