A novel electromagnetic elastomer membrane actuator with a semi-embedded coil
A novel electromagnetic elastomer membrane actuator with a semi-embedded coil
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DOI：
10.1016/j.sna.2007.01.003
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发表时间：
2007-09-12
影响因子：
4.6
通讯作者：
Hsieh, Jerwei
中科院分区：
文献类型：
--
作者：
Yin, Hung-Lin;Huang, Yu-Che;Hsieh, Jerwei
本研究描述了一种新型的电磁薄膜致动器（EMMA）的设计，制造和测试泵的应用。本文首先综述了实现薄膜微泵的相关技术。然后提出了一种用于制造嵌有平面线圈的薄PDMS膜的概念设计和批量工艺，该平面线圈是EMMA的关键部分。本研究探讨了一些重要的问题，利用PDMS在气动泵。AD先进的EMMA与提高制造成品率和可靠性。为了证明这种方法的可行性，我们制作了不同类型的EMMA并进行了测试。对膜直径为7 mm的EMMA进行了测试，在小于500 mA的外加电流下，可以实现超过50 μ m的偏转。稳定性和可靠性测试也显示出令人鼓舞的结果。总之，所提出的EMMA可以满足大的灵活性，良好的可控性，系统紧凑性和批量处理能力的要求，并可以用来建立一个简单而有效的泵送系统。(c)2007 Elsevier B.V.保留所有权利。
This study describes the design, fabrication, and testing of a novel electromagnetic membrane actuator (EMMA) for pumping applications. Related technologies for realizing membrane micropump, are first reviewed. A conceptual design and batch process for fabricating thin PDMS membrane embedded with a planar coil, which is the essential part of EMMA, is then proposed. This study investigates some important issues relating to the utilization of PDMS in pneumatic pumping. AD advanced EMMA with improved fabrication yield and reliability is also presented. To demonstrate the feasibility, different types of EMMA are fabricated and tested. The EMMA with membrane diameter of 7 mm was tested, and a deflection exceeding 50 mu m can be achieved with an applied current of less than 500 mA. Stability and reliability tests also showed promising results. To summarize, the proposed EMMA can fulfill the requirements of large flexibility, good controllability, system compactness and batch-process capability, and can be used to establish a simple and effective pumping system. (c) 2007 Elsevier B.V. All rights reserved.