Energy Dissipation Mechanisms in Lead Zirconate Titanate Thin Film Transduced Micro Cantilevers
Energy Dissipation Mechanisms in Lead Zirconate Titanate Thin Film Transduced Micro Cantilevers
复制标题
锆钛酸铅薄膜转换微悬臂梁的能量耗散机制
DOI：
10.1143/jjap.45.8795
复制
发表时间：
2006
影响因子：
1.5
通讯作者：
T. Mihara
中科院分区：
文献类型：
--
作者：
Jian Lu;T. Ikehara;Yi Zhang;R. Maeda;T. Mihara
高品质因数（Q 因数）对于谐振质量传感器来说是最理想的，因为它们的灵敏度很大程度上取决于质量吸附后可检测的频移。作者制造了锆钛酸铅 (PZT) 薄膜换能微悬臂梁并研究了能量耗散机制，以更好地了解影响 Q 因子的基本方面。研究发现，即使在大气压条件下，多层器件结构和 PZT 薄膜引起的能量耗散也值得注意。 PZT 薄膜对能量耗散的影响在减压下变得占主导地位。因此，当压力降低到分子流区域时，没有 PZT 膜的悬臂的 Q 因子变得比有 PZT 膜的悬臂更大。单层 SiO2 悬臂梁表现出最大的本征 Q 因子。 PZT 薄膜中的机电转换和各层之间性能差异引起的热弹性阻尼对能量耗散有显着贡献。
A high quality factor (Q-factor) is most desirable for resonant mass sensors because their sensitivity greatly depends on the detectable frequency shift after mass adsorption. The authors fabricated lead zirconate titanate (PZT) thin film transduced micro cantilevers and studied the energy dissipation mechanisms to better understand the essential aspects affecting the Q-factor. It was found that energy dissipation induced by the multi-layered device structure and the PZT thin film was noteworthy even under atmospheric pressure conditions. The effects of the PZT film on the energy dissipation became dominant under reduced pressure. Accordingly, the Q-factors of cantilevers without PZT film became larger than those with PZT film when pressure was reduced into the molecular flow region. The single-layered SiO2 cantilever exhibited the largest intrinsic Q-factor. The electro-mechanical conversion in the PZT film and the thermoelastic damping caused by the property difference between each layer contributed significantly to the energy dissipation.