Virtual Metrology-based Engineering Chain Management by Multi-classification of Quality using Support Vector Machine for Semiconductor Manufacturing
Virtual Metrology-based Engineering Chain Management by Multi-classification of Quality using Support Vector Machine for Semiconductor Manufacturing
复制标题
基于虚拟计量的半导体制造中使用支持向量机进行质量多分类的工程链管理
DOI：
10.1504/ijise.2011.040763
复制
发表时间：
2011
期刊：
影响因子：
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通讯作者：
Sumika ARIMA
中科院分区：
文献类型：
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作者：
Tomoyoshi Shimobaba;Taro Toyota;Nobuyuki Masuda;Tomoyoshi Ito;Sumika ARIMA
