ATOMIC FORCE MICROSCOPE
ATOMIC FORCE MICROSCOPE
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DOI：
10.1103/physrevlett.56.930
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发表时间：
1986-03-03
影响因子：
8.6
通讯作者：
GERBER, C
中科院分区：
文献类型：
--
作者：
BINNIG, G;QUATE, CF;GERBER, C
扫描隧道显微镜被提出作为一种测量小到10−18N的力的方法，作为这一概念的一个应用，我们介绍了一种能够在原子尺度上研究绝缘子表面的新型显微镜。原子力显微镜是扫描隧道显微镜和触针轮廓仪原理的结合。它结合了一个不会损坏表面的探头。我们在空气中的初步结果表明，横向分辨率为30äA，垂直分辨率小于1ä。
The scanning tunneling microscope is proposed as a method to measure forces as small as 10− 18 N. As one application for this concept, we introduce a new type of microscope capable of investigating surfaces of insulators on an atomic scale. The atomic force microscope is a combination of the principles of the scanning tunneling microscope and the stylus profilometer. It incorporates a probe that does not damage the surface. Our preliminary results in air demonstrate a lateral resolution of 30 ÅA and a vertical resolution less than 1 Å.