Fabrication and testing of planar chalcogenide waveguide integrated microfluidic sensor
Fabrication and testing of planar chalcogenide waveguide integrated microfluidic sensor
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DOI：
10.1364/oe.15.002307
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发表时间：
2007-03-05
期刊：
影响因子：
3.8
通讯作者：
Richardson, Kathleen
中科院分区：
文献类型：
--
作者：
Hu, Juejun;Tarasov, Vladimir;Richardson, Kathleen
据我们所知，我们已经制造并测试了第一个与硅衬底上的平面硫属玻璃波导单片集成的微流体装置。高品质的Ge 23 Sb 7S 70玻璃薄膜已被沉积到氧化物涂层的硅片上使用热蒸发，和高折射率对比度的通道波导已被定义使用SF6等离子体刻蚀。在光固化树脂（SU 8）中的微流体通道图案化和通过聚二甲基硅氧烷（PDMS）盖的通道密封完成了装置制造。硫族化物波导在1550 nm处产生2.3 dB/cm的传输损耗。我们在这封信中表明，使用这种设备，N-甲基苯胺可以检测到使用其良好定义的吸收指纹的N-H键附近1496 nm。我们的测量表明，传感器的线性响应，以不同的N-甲基苯胺浓度。从我们的实验，该传感器的灵敏度下降到N-甲基苯胺浓度0.7体积%是预期的。鉴于低成本的制造工艺，和强大的设备配置，我们的集成方案提供了一个有前途的化学传感应用的设备平台。(c)2007年，美国光学学会。
We have fabricated and tested, to the best of our knowledge, the first microfluidic device monolithically integrated with planar chalcogenide glass waveguides on a silicon substrate. High-quality Ge23Sb7S70 glass films have been deposited onto oxide coated silicon wafers using thermal evaporation, and high-index-contrast channel waveguides have been defined using SF6 plasma etching. Microfluidic channel patterning in photocurable resin (SU8) and channel sealing by a polydimethylsiloxane (PDMS) cover completed the device fabrication. The chalcogenide waveguides yield a transmission loss of 2.3 dB/cm at 1550 nm. We show in this letter that using this device, N-methylaniline can be detected using its well-defined absorption fingerprint of the N-H bond near 1496 nm. Our measurements indicate linear response of the sensor to varying N-methylaniline concentrations. From our experiments, a sensitivity of this sensor down to a N-methylaniline concentration 0.7 vol. % is expected. Given the low-cost fabrication process used, and robust device configuration, our integration scheme provides a promising device platform for chemical sensing applications. (c) 2007 Optical Society of America.