Fabrication of Periodic Nanostructures Using AFM Tip-Based Nanomachining: Combining Groove and Material Pile-Up Topographies
Fabrication of Periodic Nanostructures Using AFM Tip-Based Nanomachining: Combining Groove and Material Pile-Up Topographies
复制标题
使用基于 AFM 尖端的纳米加工制造周期性纳米结构：结合凹槽和材料堆积形貌
DOI：
10.1016/j.eng.2018.09.010
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发表时间：
2018
期刊：
影响因子：
12.8
通讯作者：
Sun Yazhou
中科院分区：
文献类型：
--
作者：
Geng Yanquan;Yan Yongda;Wang Jiqiang;Brousseau Emmanuel;Sun Yanwen;Sun Yazhou
提出了一种基于原子力显微镜针尖的周期性纳米结构加工方法。该方法依赖于将由机加工凹槽产生的形貌与由这些凹槽侧面上的累积堆积材料产生的形貌相结合。结果表明，控制相邻平行沟槽之间的距离是保证所得纳米结构质量的关键因素。实验结果表明，当相邻划痕道间的进给量等于单个沟槽两侧材料堆积峰间的宽度时，可以获得质量较好的周期性图形。通过应用一维和二维快速傅里叶变换（FFT）算法来评估所获得的纳米结构的周期性的质量。在测量的AFM图像的横截面的归一化振幅-频率特性图中，峰值部分的面积与总面积的比率被用于定量分析周期性纳米结构。最后，研究了周期性纳米结构表面着色的光学效应在防伪和金属传感领域的潜在应用。
This paper presents an atomic force microscopy (AFM) tip-based nanomachining method to fabricate periodic nanostructures. This method relies on combining the topography generated by machined grooves with the topography resulting from accumulated pile-up material on the side of these grooves. It is shown that controlling the distance between adjacent and parallel grooves is the key factor in ensuring the quality of the resulting nanostructures. The presented experimental data show that periodic patterns with good quality can be achieved when the feed value between adjacent scratching paths is equal to the width between the two peaks of material pile-up on the sides of a single groove. The quality of the periodicity of the obtained nanostructures is evaluated by applying one- and two-dimensional fast Fourier transform (FFT) algorithms. The ratio of the area of the peak part to the total area in the normalized amplitude–frequency characteristic diagram of the cross-section of the measured AFM image is employed to quantitatively analyze the periodic nanostructures. Finally, the optical effect induced by the use of machined periodic nanostructures for surface colorization is investigated for potential applications in the fields of anti-counterfeiting and metal sensing.