Micromachined catalytic combustion type gas sensor for hydrogen detection
Micromachined catalytic combustion type gas sensor for hydrogen detection
复制标题
用于氢气检测的微机械催化燃烧式气体传感器
DOI：
10.1049/mnl.2013.0468
复制
发表时间：
2013-10-01
影响因子：
1.3
通讯作者：
Xia, Shanhong
中科院分区：
文献类型：
--
作者：
Liu, Xifeng;Dong, Hanpeng;Xia, Shanhong
采用微机电系统技术研制了一种催化燃烧式氢传感器。氧化铪薄膜作为绝缘层的应用已经通过电子束蒸发沉积。采用化学气相沉积法制备了半导体燃烧催化剂氧化锡层。这是半导体材料在催化燃烧气体传感器中的一种新的应用。二氧化铪薄膜在900°C时的电阻率约为3 × 1012 Ω cm。感测元件和参考元件都可以连接在合适的电路中，例如具有低功耗的惠斯通配置。该催化燃烧传感器在4V工作电压下对氢气有很高的响应，在0 ~ 4%体积浓度范围内具有较高的相对灵敏度和良好的线性度。实现了微机械催化燃烧式气体传感器的一致性好、精度高。
A catalytic combustion hydrogen sensor has been fabricated using the microelectromechanical system technology. The application of hafnium oxide thin films as the insulating layer has been deposited by electron beam evaporation. The semiconductor combustion catalyst tin oxide layer was prepared by chemical vapour deposition. It is a novel application of semiconductor material to a catalytic combustion gas sensor. The resistivity of hafnium dioxide thin film is about 3 × 1012 Ω cm at 900°C. Both the sensing elements and the reference elements could be connected in a suitable circuit such as a Wheatstone configuration with low power consumption. The catalytic combustion sensor shows high response to hydrogen at an operating voltage of 4 V and has a higher relative sensitivity and a good linearity for concentrations of hydrogen ranging from 0 to 4% in volume. Good consistency and high accuracy of the micromachined catalytic combustion gas sensor were achieved.