Hardware and Software Advances in Commercially Available Atom Probe Tomography Systems
Hardware and Software Advances in Commercially Available Atom Probe Tomography Systems
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商用原子探针断层扫描系统的硬件和软件进步
DOI：
10.1017/s1431927617000885
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发表时间：
2017
影响因子：
2.8
通讯作者：
D. Larson
中科院分区：
文献类型：
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作者：
R. Ulfig;T. Prosa;Yimeng Chen;K. Rice;I. Martin;D. Reinhard;Brian P. Gieser;E. Oltman;D. Lenz;J. Bunton;M. Dyke;T. Kelly;D. Larson
在过去的15年里，引用原子探针断层扫描（APT）的同行评审出版物数量增长了近五倍[1]。APT的迅速采用涉及许多因素，APT是一种自20世纪70年代初以来一直使用的显微镜。今天典型的原子探针的性能在数据收集速率、视场、质量分辨能力、可靠性和软件方面比早期的系统好几个数量级。易于使用的激光脉冲系统的可用性，再加上FIB-SEM样品制备的性能和可用性的变化，极大地打开了可以分析的应用阵列。这些进步，随着原子探针断层扫描显微镜的易用性和可用性的提高，已经将典型的用户从APT专家变成了寻找其他显微镜无法提供的答案的科学家。
Over the past 15 years, the number of peer reviewed publications referencing the use of atom probe tomography (APT) has grown by nearly a factor of five [1]. A number of factors are involved in this very rapid adoption of APT, a microscopy that has been in use since the early 1970s. The performance of the typical atom probe today is orders of magnitude better than the early systems in terms of data collection rate, field of view, mass resolving power, reliability and software. The availability of easy to use laser pulsed systems coupled with the changes in performance and availability of FIB-SEM sample preparation has dramatically opened the array of applications that can be analyzed. These advances, with the improved ease of use and availability of atom probe tomography microscopes, have changed the typical user from an expert in APT to a scientist looking for answers that other microscopies cannot provide.