Fabrication of micro parts using only electrochemical process
Fabrication of micro parts using only electrochemical process
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仅使用电化学工艺制造微型零件
DOI：
10.1109/memsys.2001.906499
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发表时间：
2001
期刊：
影响因子：
--
通讯作者：
T. Sakuhara
中科院分区：
文献类型：
--
作者：
N. Watanabe;M. Suda;K. Furuta;T. Sakuhara
我们研究了两种扫描加工电极的电化学工艺来制造金属微零件。它们分别是：在电化学加工制成的模具上电铸，以及电镀后再进行电化学加工成形。用前一种方法制造了直径为600 /spl平方/m、厚度为100 /spl平方/m的电铸镍齿轮，用后一种方法制造了直径为1700 /spl平方/m、厚度为30 /spl平方/m的电铸镍齿轮。
We have investigated two kinds of electrochemical processes that scan a processing electrode to fabricate metal micro parts. They are, electroforming on the mold made by electrochemical processing, and shape forming by electrochemical processing after electroplating. An electroformed Ni gear with diameter of 600 /spl square/m and thickness of 100 /spl square/m was fabricated by the former method, and a Ni gear with diameter of 1700 /spl square/m and thickness of 30 /spl square/m was fabricated by the latter method.