T.Nomura, K.Kamiya, et al.: "Shape measurements of Mirror Surfaces with a Lateral shearing Interferometer During Machine Running"Precision Engineering. 22. 185-189 (1998)
T.Nomura, K.Kamiya, et al.: "Shape measurements of Mirror Surfaces with a Lateral shearing Interferometer During Machine Running"Precision Engineering. 22. 185-189 (1998)
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T.Nomura、K.Kamiya 等人:“机器运行期间使用横向剪切干涉仪对镜面进行形状测量”精密工程。
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