Anodic Oxidation of Silicon Observed In-Situ by Specular X-ray Reflectivity
Anodic Oxidation of Silicon Observed In-Situ by Specular X-ray Reflectivity
复制标题
通过镜面 X 射线反射率原位观察硅的阳极氧化
DOI:
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发表时间:
2015
期刊:
影响因子:
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通讯作者:
T. Shirasawa and T. Matsushita
中科院分区:
文献类型:
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作者:
Wolfgang Voegeli;E. Arakawa;C. Kamezawa;R. Iwami;T. Shirasawa and T. Matsushita