Large-Area Niobium Titanium Nitride Superconducting Microstrip Single-Photon Detector Fabricated Using a Photolithography Process
Large-Area Niobium Titanium Nitride Superconducting Microstrip Single-Photon Detector Fabricated Using a Photolithography Process
复制标题
利用光刻工艺制备大面积铌钛氮化超导微带单光子探测器
DOI：
10.1109/tasc.2023.3249130
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发表时间：
2023
影响因子：
1.8
通讯作者：
M. Yabuno;F. China;S. Miki;H. Terai
中科院分区：
文献类型：
--
作者：
M. Yabuno;F. China;S. Miki;H. Terai
本文提出了一种采用光刻工艺制备的大面积氮化铌钛（NbTiN）超导微带单光子探测器（SMSPD）。采用i-line步进制得1 μm宽的NbTiN-SMSPD，覆盖420 × 420 μm2的有源面积，填充系数为20%。将探测器冷却至约2.2 K，并在可见光至近红外波长范围内评估其性能。该探测器工作稳定，无分流电阻，对波长为1550nm的光子具有单光子灵敏度。在406 ~ 1550nm波长范围内测量了检测计数率的偏置电流依赖关系。在850 nm以下的波长处，检测计数率随偏置电流的增加而饱和，表明内部检测效率接近100%。此外，我们使用波长为1550 nm的飞秒脉冲激光器评估了定时抖动性能。因此，我们在光斑直径为100 μm时实现了85 ps的系统时序抖动。
In this paper, we present a large-area niobium titanium nitride (NbTiN) superconducting microstrip single-photon detector (SMSPD) fabricated using a photolithography process. We fabricated a 1-μm-wide NbTiN-SMSPD covering 420 × 420 μm2 active area with a filling factor of 20% using an i-line stepper. The detector is cooled down to approximately 2.2 K, and its performance is evaluated at the wavelengths from visible to near-infrared. The detector operates stably without a shunt resistor and shows single-photon sensitivity for photons with a wavelength of 1550 nm. The bias current dependence of the detection count rate is measured at the wavelengths from 406 to 1550 nm. The saturation of the detection count rate with increasing the bias current was successfully observed at wavelengths below 850 nm, suggesting an internal detection efficiency approaching 100%. Furthermore, we evaluated the timing jitter performance using the femtosecond pulse laser with a wavelength of 1550 nm. Consequently, we achieved a system timing jitter of 85 ps for a light spot diameter of 100 μm.