Elemental gradient functional thin films preparation by sputtering with NiO and SUS304 mixed powder targets
Elemental gradient functional thin films preparation by sputtering with NiO and SUS304 mixed powder targets
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NiO与SUS304混合粉末靶材溅射制备元素梯度功能薄膜
DOI:
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发表时间:
2022
期刊:
影响因子:
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通讯作者:
Hiroharu Kawasaki
中科院分区:
文献类型:
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作者:
長谷川由華;中島雅子;Hiroharu Kawasaki