Wide-angle structured light with a scanning MEMS mirror in liquid
Wide-angle structured light with a scanning MEMS mirror in liquid
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DOI：
10.1364/oe.24.003479
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发表时间：
2016-02-22
期刊：
影响因子：
3.8
通讯作者：
Xie, Huikai
中科院分区：
文献类型：
--
作者：
Zhang, Xiaoyang;Koppal, Sanjeev J.;Xie, Huikai
微机电（MEMS）镜将视觉功能扩展到小型低功耗平台上。然而，这些MEMS反射镜的视场（FOV）通常小于90。并且MEMS镜扫描角的任何增加都具有在功率、尺寸、速度和稳定性方面的设计和制造折衷。因此，我们需要技术来增加扫描范围，同时仍然保持小的外形尺寸。在本文中，我们利用我们最近的突破，使MEMS镜浸没在液体中。在允许MEMS移动的同时，液体还提供了“斯涅耳窗”效应，并实现了扩大的FOV（约150度）。我们提出了一个优化的MEMS反射镜设计，并使用它来演示在极端广角结构光的应用。(C)2016美国光学学会
Microelectromechanical (MEMS) mirrors have extended vision capabilities onto small, low-power platforms. However, the field-of-view (FOV) of these MEMS mirrors is usually less than 90. and any increase in the MEMS mirror scanning angle has design and fabrication trade-offs in terms of power, size, speed and stability. Therefore, we need techniques to increase the scanning range while still maintaining a small form factor. In this paper we exploit our recent breakthrough that has enabled the immersion of MEMS mirrors in liquid. While allowing the MEMS to move, the liquid additionally provides a "Snell's window" effect and enables an enlarged FOV (approximate to 150 degrees). We present an optimized MEMS mirror design and use it to demonstrate applications in extreme wide-angle structured light. (C) 2016 Optical Society of America