Chemical vapor deposition growth of boron incorporated graphitic carbon nitride film for carbon based semiconductor systems
Chemical vapor deposition growth of boron incorporated graphitic carbon nitride film for carbon based semiconductor systems
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用于碳基半导体系统的掺硼石墨氮化碳薄膜的化学气相沉积生长
DOI:
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发表时间:
2019
期刊:
影响因子:
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通讯作者:
Hashimoto Yoshio
中科院分区:
文献类型:
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作者:
Urakami Noriyuki;Kosaka Maito;Hashimoto Yoshio