Design and Fabrication of a MEMS-Based Break Junction Device for Mechanical Strain-Correlated Optical Characterization of a Single-Molecule
Design and Fabrication of a MEMS-Based Break Junction Device for Mechanical Strain-Correlated Optical Characterization of a Single-Molecule
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DOI：
10.1109/jmems.2020.3038024
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发表时间：
2021-02-01
影响因子：
2.7
通讯作者：
Hihath, Joshua
中科院分区：
文献类型：
--
作者：
Jeong, Hyunhak;Domulevicz, Lucas K.;Hihath, Joshua
在这里，我们提出了一个强大的实验室芯片系统的多维（电气，光学和机械）表征的单分子利用硅微机械微机电系统（MEMS）芯片。我们的基于MEMS的断裂结（MEMS-BJ）利用传统的MEMS芯片制造技术来创建静电梳状致动器，能够以亚纳米位移分辨率在两个纳米级金属电极之间捕获单分子。为了实现这一功能，芯片的组件（如弯曲弹簧，梳状驱动指）的基础上进行了精心设计的分析模型和基本性能参数进行了验证，使用有限元分析模拟和电容传感器测量。使用该系统，我们能够进行组合的单分子拉曼光谱和分子电导测量的实时。最后，我们提出了一个有代表性的案例研究的多维表征的单分子结通过分析相关的电气，光学和机械信息，同时机械调制的结上的应变，允许直接观察分子结构和电子输运之间的相互作用。我们相信，我们的MEMS-BJ系统将能够在单分子水平上进行更深入的多维研究，促进化学和生物传感器应用新方法的开发。[2020 - 0307] 2020 - 0307 - 0307
Here, we propose a robust lab-on-a-chip system for multi-dimensional (electrical, optical, and mechanical) characterization of a single-molecule utilizing a Si micromachined micro-electromechanical-system (MEMS) chip. Our MEMS-based break junction (MEMS-BJ) utilizes conventional MEMS chip fabrication techniques to create an electrostatic comb actuator capable of trapping a single-molecule between two nanoscale metal electrodes with sub-nanometer displacement resolution. In order to achieve this functionality, components of the chip (e.g flexural spring, comb drive fingers) are delicately designed based on an analytical model and basic performance parameters are verified using a finite element analysis simulation and capacitive sensor measurements. Using this system, we are able to perform combined single-molecule Raman spectroscopy and molecular conductance measurements in real-time. Finally, we present a representative case study of the multi-dimensional characterization of a single-molecule junction by analyzing correlated electrical, optical, and mechanical information while mechanically modulating the strain on the junction which allows for direct observation of the interplay between molecular structure and electron transport. We believe that our MEMS-BJ system will enable a deeper multi-dimensional study at a single-molecule level promoting the development of new methods for chemical and biological sensor applications. [2020-0307]