A surface micromachined silicon accelerometer with on-chip detection circuitry
A surface micromachined silicon accelerometer with on-chip detection circuitry
复制标题
具有片上检测电路的表面微机械硅加速度计
DOI：
10.1016/0924-4247(94)00815-9
复制
发表时间：
1994
影响因子：
4.6
通讯作者：
S. Sherman
中科院分区：
文献类型：
--
作者：
W. Kuehnel;S. Sherman
介绍了一种单片集成的加速度传感器，该传感器在同一芯片上集成了完整的检测电路。它是通过多晶硅表面微加工的方法制造的。这一设计代表了第一款完全满足汽车行业要求的全集成加速度计。传感器结构本身由一个差动电容器组成，其交错的手指平行于芯片表面平移。该检测电路以1 MHz的载波高频工作。加速度计的输出信号反馈到传感器元件，从而建立了一个整体的机电闭环系统。这使得传感器可以在强制平衡模式下工作，从而减少传感器的偏转，从而减少噪声和失真。此外，还实现了传感器元件的静电激活自检功能。总体灵敏度为20 mVG−1，加速度范围为±50g。介绍了传感器元件制造工艺的基本原理和基本的理论考虑。给出了完整的“传感器+电路”系统的测量结果。
A monolithically integrated acceleration sensor is presented, which contains the complete detection circuitry on the same chip. It is fabricated by means of polysilicon surface micromachining. This design represents the first fully integrated accelerometer that completely meets the requirements of the automotive industry. The sensor structure itself consists of a differential capacitor, whose interdigitated fingers translate parallel to the chip surface. The detection circuitry works at high frequency with a 1 MHz carrier. The output signal of the accelerometer is fed back to the sensor element, so that an overall electromechanical closed loop is built. This allows the sensor to work in a forced-balance mode, reducing the sensor deflection and thus noise and distortion. Additionally, an electrostatic activated self-test function of the sensor element is implemented. The overall sensitivity is 20 mVg−1with an acceleration range of ±50g. Fundamentals of the fabrication process of the sensor element and basic theoretical considerations are presented. Measurement results of the complete 'sensor and circuit' system are given.