Nodal Analysis for MEMS Design Using SUGAR v0.5
Nodal Analysis for MEMS Design Using SUGAR v0.5
复制标题
使用 SUGAR v0.5 进行 MEMS 设计的节点分析
DOI：
--
复制
发表时间：
1998
期刊：
影响因子：
--
通讯作者：
N. Zhou
中科院分区：
文献类型：
--
作者：
Jason V. Clark;Pister K.S.J.;N. Zhou
This paper presents the development of a simulation program (SUGAR) for planar MEMS devices. The approach is based on nodal analysis to solve coupled nonlinear differential equations. The current version SUGAR v0.5 can perform DC, steady state, and transient analysis. It is implemented in Matlab[1] and the accuracy of the program is comparable with analytical solutions, experimental data and FEM simulations. The preliminary work shows that this approach could lead to an accurate, fast, and high-level simulation package for MEMS.
