Automated plasmon peak fitting derived temperature mapping in a scanning transmission electron microscope
Automated plasmon peak fitting derived temperature mapping in a scanning transmission electron microscope
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DOI：
10.1063/5.0039864
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发表时间：
2021-03-01
期刊：
影响因子：
1.6
通讯作者：
Klie, Robert
中科院分区：
文献类型：
--
作者：
Barker, Anthony;Sapkota, Bibash;Klie, Robert
纳米级测温是一种基于纳米空间分辨率的非侵入性但精确的温度测量方法，在过去几年中已成为一个非常活跃的研究领域。在透射电子显微镜中，纳米级测温在原位实验或评估电子束诱导加热的影响时尤其重要。在本文中，我们提出了一种基于透射电子显微镜中的电子能量损失光谱的纳米级测温方法，利用等离子体共振峰相对于零损失峰的能量偏移作为温度的函数来局部测量硅纳米颗粒的温度。我们证明，使用非负矩阵分解和叠加光谱的曲线拟合，与之前报道的手动拟合方法相比，可以显着提高温度精度。我们将讨论实现 6 meV 精度以确定等离子峰位置所需的采集参数。
Nanoscale thermometry, an approach based on non-invasive, yet precise measurements of temperature with nanometer spatial resolution, has emerged as a very active field of research over the last few years. In transmission electron microscopy, nanoscale thermometry is particularly important during in situ experiments or to assess the effects of beam induced heating. In this article, we present a nanoscale thermometry approach based on electron energy-loss spectroscopy in a transmission electron microscope to measure locally the temperature of silicon nanoparticles using the energy shift of the plasmon resonance peak with respect to the zero-loss peak as a function of temperature. We demonstrate that using non-negative matrix factorization and curve fitting of stacked spectra, the temperature accuracy can be improved significantly over previously reported manual fitting approaches. We will discuss the necessary acquisition parameters to achieve a precision of 6 meV to determine the plasmon peak position.