Nanoscaled interdigitated electrode arrays for biochemical sensors

Nanoscaled interdigitated electrode arrays for biochemical sensors
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用于生化传感器的纳米级叉指电极阵列

DOI:
10.1109/sensor.1997.635249
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发表时间:
1997
期刊:
Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)
影响因子:
--
通讯作者:
Robert Mertens
Robert Mertens
中科院分区:
--
文献类型:
--
作者:
P. Van Gerwen;W. Laureyn;W. Laureys;Guido Huyberechts;M. Op de Beeck;Kris Baert;J. Suls;Willy Sansen;P. Jacobs;L. Hermans;Robert Mertens

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采用深紫外光刻技术制作了纳米级交叉指状电极阵列。在较大的活性区域(0.5 mm/SPL次/1 mm)上获得了从500 nm到250 nm的电极宽度和间距。这些电极允许通过阻抗测量来检测生物分子结构(如抗原、DNA)的亲和力结合。对这种传感器进行了理论分析、实验表征,并作为亲和生物传感器进行了验证。
Nanoscaled interdigitated electrode arrays were made with Deep U.V. lithography. Electrode widths and spacings from 500 nm down to 250 nm were achieved on large active areas (0.5 mm/spl times/1 mm). These electrodes allow for the detection of affinity binding of biomolecular structures (e.g. antigens, DNA) by impedimetric measurements. Such a sensor is developed, theoretically analyzed, experimentally characterized, and is demonstrated as an affinity biosensor.
DOI: 10.1016/0956-5663(95)96958-2
发表时间: 1995-09-01
影响因子: 12.6
作者:
DESILVA, MS;ZHANG, Y;STETTER, JR
通讯作者: STETTER, JR