Nango & Ogawa: "Crystal perfection and detection of defects just under wafer surfaces of semiconducting and insulating materials" Inst. Phys. Conf.Ser.No.135. 127-130 (1994)

Nango & Ogawa: "Crystal perfection and detection of defects just under wafer surfaces of semiconducting and insulating materials" Inst. Phys. Conf.Ser.No.135. 127-130 (1994)
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