Improvement of Atmospheric Compensator to Reduce the Laser Measurement Error for Ultra-Precision Machine Tools(in Japanese)

Improvement of Atmospheric Compensator to Reduce the Laser Measurement Error for Ultra-Precision Machine Tools(in Japanese)
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大气补偿器的改进减少超精密机床激光测量误差(日文)

DOI:
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发表时间:
2005
期刊:
Proceeding of Autumn Conference of Japan Society for Precision Engineering
影响因子:
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通讯作者:
Naoya IKAWA
Naoya IKAWA
中科院分区:
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文献类型:
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作者:
Kazutoshi ADACHI;Katsumi YAMAGUCHI;Sakuro HONDA;Kazuo Murata;Hideki IWAI;Nobutaka TAKAMI;Shoichi SHIMADA;Naoya IKAWA

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